Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons

James M. Chenault; Charles S. Feigerle; Xianming Han; Robert W. Shaw

doi:10.1016/S0925-9635(01)00381-8

Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons

James M. Chenault, Charles S. Feigerle, Xianming Han, Robert W. Shaw

Research output: Contribution to journal › Article › peer-review

Abstract

The chemistry of diamond film growth from chlorinated hydrocarbons has been investigated using a hot filament reactor coupled to an orifice sampling mass spectrometer. The relative concentrations of the species present near the growth surface have been determined as a function of filament temperature for dilute mixtures of CH ₄ , CH ₃ Cl, CH ₂ Cl ₂ and CHCl ₃ in H ₂ . Mass spectral analysis indicated that chlorinated hydrocarbons are sequentially dechlorinated in the presence of hydrogen at moderate reactor temperatures. A dark film was deposited on all surfaces of the reactor during studies of this dechlorination of CHCl ₃ . Raman analysis indicated that these deposits are small particle polycrystalline graphite. Pretreatment of a Si 〈111〉 substrate under conditions that create the graphite deposit is seen to produce a significant nucleation enhancement of diamond when followed by growth at a higher temperature. Chemical mechanisms for some of these processes are proposed.

Original language	American English
Journal	Scholarship and Professional Work - LAS
Volume	10
Issue number	8
DOIs	https://doi.org/10.1016/S0925-9635(01)00381-8
State	Published - Jan 1 2001

Keywords

chlorinated hydrocarbons
diamond
film nucleation

Disciplines

Atomic, Molecular and Optical Physics
Physics

Access to Document

10.1016/S0925-9635(01)00381-8License: Unspecified

http://dx.doi.org/10.1016/S0925-9635(01)00381-8

Cite this

@article{2b299527df61448db2d699dfcb6ffd54,

title = "Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons",

abstract = " The chemistry of diamond film growth from chlorinated hydrocarbons has been investigated using a hot filament reactor coupled to an orifice sampling mass spectrometer. The relative concentrations of the species present near the growth surface have been determined as a function of filament temperature for dilute mixtures of CH 4 , CH 3 Cl, CH 2 Cl 2 and CHCl 3 in H 2 . Mass spectral analysis indicated that chlorinated hydrocarbons are sequentially dechlorinated in the presence of hydrogen at moderate reactor temperatures. A dark film was deposited on all surfaces of the reactor during studies of this dechlorination of CHCl 3 . Raman analysis indicated that these deposits are small particle polycrystalline graphite. Pretreatment of a Si 〈111〉 substrate under conditions that create the graphite deposit is seen to produce a significant nucleation enhancement of diamond when followed by growth at a higher temperature. Chemical mechanisms for some of these processes are proposed.",

keywords = "chlorinated hydrocarbons, diamond, film nucleation",

author = "Chenault, {James M.} and Feigerle, {Charles S.} and Xianming Han and Shaw, {Robert W.}",

year = "2001",

month = jan,

day = "1",

doi = "10.1016/S0925-9635(01)00381-8",

language = "American English",

volume = "10",

journal = "Scholarship and Professional Work - LAS",

number = "8",

}

TY - JOUR

T1 - Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons

AU - Chenault, James M.

AU - Feigerle, Charles S.

AU - Han, Xianming

AU - Shaw, Robert W.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - The chemistry of diamond film growth from chlorinated hydrocarbons has been investigated using a hot filament reactor coupled to an orifice sampling mass spectrometer. The relative concentrations of the species present near the growth surface have been determined as a function of filament temperature for dilute mixtures of CH 4 , CH 3 Cl, CH 2 Cl 2 and CHCl 3 in H 2 . Mass spectral analysis indicated that chlorinated hydrocarbons are sequentially dechlorinated in the presence of hydrogen at moderate reactor temperatures. A dark film was deposited on all surfaces of the reactor during studies of this dechlorination of CHCl 3 . Raman analysis indicated that these deposits are small particle polycrystalline graphite. Pretreatment of a Si 〈111〉 substrate under conditions that create the graphite deposit is seen to produce a significant nucleation enhancement of diamond when followed by growth at a higher temperature. Chemical mechanisms for some of these processes are proposed.

AB - The chemistry of diamond film growth from chlorinated hydrocarbons has been investigated using a hot filament reactor coupled to an orifice sampling mass spectrometer. The relative concentrations of the species present near the growth surface have been determined as a function of filament temperature for dilute mixtures of CH 4 , CH 3 Cl, CH 2 Cl 2 and CHCl 3 in H 2 . Mass spectral analysis indicated that chlorinated hydrocarbons are sequentially dechlorinated in the presence of hydrogen at moderate reactor temperatures. A dark film was deposited on all surfaces of the reactor during studies of this dechlorination of CHCl 3 . Raman analysis indicated that these deposits are small particle polycrystalline graphite. Pretreatment of a Si 〈111〉 substrate under conditions that create the graphite deposit is seen to produce a significant nucleation enhancement of diamond when followed by growth at a higher temperature. Chemical mechanisms for some of these processes are proposed.

KW - chlorinated hydrocarbons

KW - diamond

KW - film nucleation

UR - https://digitalcommons.butler.edu/facsch_papers/754

UR - http://dx.doi.org/10.1016/S0925-9635(01)00381-8

U2 - 10.1016/S0925-9635(01)00381-8

DO - 10.1016/S0925-9635(01)00381-8

M3 - Article

VL - 10

JO - Scholarship and Professional Work - LAS

JF - Scholarship and Professional Work - LAS

IS - 8

ER -

Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons

Abstract

Keywords

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